Chemical composition and structure of thin films produced by chemical vapor deposition

Journal of Structural Chemistry

Volumn 43, Issue 4, 2002, Pages 556-580

  Badalyan, A M ^a   Belyi, V I ^a   Gel'fond, N V ^a   Igumenov, I K ^a   Kosinova, M L ^a   Morozova, N B ^a   Rastorguev, A A ^a   Rumyantsev, Yu M ^a   Smirnova, T P ^a   Fainer, N I ^a   Yakovkina, L V ^a  

^a NIKOLAEV INSTITUTE OF INORGANIC CHEMISTRY   (Russian Federation)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 19044392848     PISSN: 00224766     EISSN: None     Source Type: Journal    
DOI: 10.1023/A:1022084017202     Document Type: Article

References (37)

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