Ozone treatment of SiC for improved performance of gas sensitive Schottky diodes

Materials Science Forum

Volumn 338, Issue , 2000, Pages

  Zangooie, S ^a   Arwin, H ^a   Lundstrom I ^a   Spetz, Anita L ^a  

^a LINKÖPING UNIVERSITY   (Sweden)

Author keywords

[No Author keywords available]

Indexed keywords

CHEMICAL CLEANING; CHEMICAL SENSORS; ELLIPSOMETRY; HYDROGEN; OXIDATION; OZONE; SCHOTTKY BARRIER DIODES; SEMICONDUCTING SILICON COMPOUNDS; SILICA; SPECTROSCOPY; SURFACE CLEANING;

OZONE TREATMENT;

SILICON CARBIDE;

EID: 18844463006     PISSN: 02555476     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Article

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