High resolution Carbon/Carbon multilayers

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 4782, Issue , 2002, Pages 160-168

  Baranov, Alexander ^a   Dietsch, Reiner ^b   Holz, Thomas ^b   Menzel, Maik ^b   Weißbach, Danny ^b   Scholz, Roland ^c   Melov, Valeri ^d   Schreiber, Jürgen ^d  

^a Res Institute of Vacuum Technique   (Russian Federation)

^b FRAUNHOFER INSTITUTE FOR MATERIAL AND BEAM TECHNOLOGY IWS   (Germany)

^c MAX PLANCK INSTITUTE OF MICROSTRUCTURE PHYSICS   (Germany)

^d EADQ   (Germany)

Author keywords

Carbon; High resolution multilayers; Pulsed Laser Deposition; Stress; X ray mirror; XRD; XRR

Indexed keywords

CARBON; FILM GROWTH; MIRRORS; OPTICAL MULTILAYERS; OPTICAL RESOLVING POWER; PULSED LASER DEPOSITION; X RAY DIFFRACTION;

HIGH RESOLUTION MULTILAYERS;

X RAY OPTICS;

EID: 0037965476     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.451361     Document Type: Conference Paper

References (10)

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8. th international conference on residual stresses, ICRS-6, Oxford-United Kingdom 10-12 July 2000, IOM Communications Ltd, London, UK
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