Soft X-ray reflectivity and structure evaluation of Ni/C/Ti/C multilayer X-ray mirrors for water-window region

Nuclear Instruments and Methods in Physics Research, Section A: Accelerators, Spectrometers, Detectors and Associated Equipment

Volumn 467-468, Issue , 2001, Pages 341-344

  Takenaka, H ^a   Ito, H ^a   Nagai, K ^a   Muramatsu, Y ^b   Gullikson, E ^c   Perera, R C C ^c  

^a NTT Advanced Technology Corporation   (Japan)

^b JAPAN ATOMIC ENERGY AGENCY   (Japan)

^c LAWRENCE BERKELEY NATIONAL LABORATORY   (United States)

Author keywords

Heat resistance; Multilayer mirror; Ni C Ti C; Ni Ti; Reflectivity; Water window

Indexed keywords

CARBON; HEAT RESISTANCE; MULTILAYERS; NICKEL; TITANIUM; X RAY SPECTROSCOPY;

SOFT X RAY REFLECTIVITY;

MIRRORS;

EID: 0035928287     PISSN: 01689002     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0168-9002(01)00320-5     Document Type: Conference Paper

References (4)

1. Fabrication and evaluation of Ni/C multilayer soft X-ray mirrors