Micromechanical slow-velocity delay lines

Conference Proceedings - 33rd European Microwave Conference, EuMC 2003

Volumn 3, Issue , 2003, Pages 967-970

  Alastalo, Ari T ^a   Mattila, Tomi ^a   Seppä, Heikki ^a   Dekker, James ^a  

^a VTT TECHNICAL RESEARCH CENTRE OF FINLAND   (Finland)

Author keywords

[No Author keywords available]

Indexed keywords

CHAINS; MICROMECHANICAL RESONATORS; WAVE PROPAGATION;

ANALYTICAL RESULTS; BANDPASS RESPONSE; CAPACITIVE TRANSDUCERS; MICRO-MECHANICAL; OPTIMAL DESIGN; PROTOTYPE DEVICES; RADIOFREQUENCY SIGNALS; SIGNAL GROUPS;

ELECTRIC DELAY LINES;

EID: 18844430986     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/EUMC.2003.177642     Document Type: Conference Paper

References (10)

1. B. A. Auld, Acoustic Fields and Waves in Solids, 2nd ed., Krieger, 1990.
2. T. Mattila, J. Kiihamäki, T. Lamminmäki, O. Jaakkola, P. Rantakari, A. Oja, H. Seppä, H. Kattelus, and I. Tittonen, "A 12 MHz Bulk Acoustic Micromechanical Oscillator," Sensors and Actuators A: Physical, vol. 101, pp. 1-9, Sept. 2002.
3. Ville Kaajakari, Tomi Mattila, Aarne Oja, Jyrki Kiihamäki, Hannu Kattelus, Mika Koskenvuori, Pekka Rantakari, Ilkka Tittonen, and Heikki Seppä, "'Square-Extensional Mode Single-Crystal Silicon Micromechanical RF-resonator," in Proc. Transducers '03, June 8-12, 2003.
4. Clark T. C. Nguyen, "Frequency-Selective MEMS for Miniaturized Low-Power Communication Devices," IEEE Trans. Microwave Theory Tech., vol. 47, no. 8, pp. 1486-1503, Aug. 1999.
5. J Jason Yao, "RF MEMS from a device perspective," J Micromech. Microeng., vol. 10, pp. R9-R38, 2000.
6. Wan-Thai Hsu, John R. Clark, and Clark T.-C. Nguyen, "A Sub-Micron Capacitive Gap Process for Multiple-Metal-Electrode Lateral Micromechanical Resonators" in Proc. IEEE MEMS Conference, Interlaken, Switzerland, 2001, pp, 349-352.
7. Neil W. Ashcroft and N. David Mermin, Solid State Physics, Saunders College Publishing, 1976.
8. Warren C. Young, Roark's Formulas for Stress and Strain, McGraw-Hill, 1989.
9. P. Rantakari, J. Kiihamäki, M. Koskenvuori, T, Lamminmäki, and I. Tittonen, "Reducing the Effect of Parasitic Capacitance on MEMS Measurements," in Proc. Transducers'01, June 8-12, 2001
10. An T. Alastalo, Tomi Mattila, and Heikki Seppä, "Analysis of a MEMS Transmission Line," to appear in: IEEE Trans. Microwave Theory Tech. vol. 51, no. 8, Aug. 2003.