SCOPUS 정보 검색 플랫폼

2004 1st IEEE International Conference on Group IV Photonics

Volumn , Issue , 2004, Pages 69-71

Compositional and optical characterization of SiOx films deposited by ECR-PECVD for photonics applications

(5) Fynn, M a Irving, E a Roschuk, T a Wojcik, J a Mascher, P a

Author keywords

[No Author keywords available]

Indexed keywords

ANNEALING; ATOMIC FORCE MICROSCOPY; CHARACTERIZATION; COMPOSITION; ELLIPSOMETRY; FOURIER TRANSFORM INFRARED SPECTROSCOPY; NANOSTRUCTURED MATERIALS; PHOTOLUMINESCENCE; PHOTONS; PLASMA ENHANCED CHEMICAL VAPOR DEPOSITION; REFRACTIVE INDEX; SILICA;

FABRY-PEROT FRINGES; NANOCRYSTALLINE SILICON MATERIALS; OPTICAL CHARACTERIZATION; PHOTONICS APPLICATIONS;

THIN FILMS;

EID: 18844391735 PISSN: None EISSN: None Source Type: Conference Proceeding
DOI: None Document Type: Conference Paper

Times cited : (2)

References (13)

1
- 0033875305
- G. Franzò, F. Iancona, V. Vinciguerra, and F. Priolo, Materials Science and Engineering B, vol. 69-70, p. 335, 2000.
- (2000) Materials Science and Engineering B , vol.69-70 , pp. 335
- Franzò, G.¹ Iancona, F.² Vinciguerra, V.³ Priolo, F.⁴

2
- 0036138165
- A. Kenyon, C. Chryssou, C. Pitt, et al., Journal of Applied Physics, vol. 2002, p. 367, 2002.
- (2002) Journal of Applied Physics , vol.2002 , pp. 367
- Kenyon, A.¹ Chryssou, C.² Pitt, C.³

3
- 0037179723
- E. S. Andrés, A. del Prado, I. Mártil, et al., Vacuum, vol. 67, p. 525, 2002.
- (2002) Vacuum , vol.67 , pp. 525
- Andrés, E.S.¹ Del Prado, A.² Mártil, I.³

4
- 0037370302
- D. Pacifi, G. Franzò, F. Iancona, and F. Priolo, Physica E, vol. 16, p. 404, 2003.
- (2003) Physica E , vol.16 , pp. 404
- Pacifi, D.¹ Franzò, G.² Iancona, F.³ Priolo, F.⁴

5
- 0001496759
- W.-T. T. Chi-Fa Lin and M. S. Feng, Journal of Applied Physics, vol. 87, p. 2808, 2000.
- (2000) Journal of Applied Physics , vol.87 , pp. 2808
- Lin, W.-T.T.C.-F.¹ Feng, M.S.²

6
- 0034707054
- L. Pavesi, L. D. Negro, C. Mazzoleni, G. Franzò, and F. Priolo, Nature, vol. 408, p. 440, 2000.
- (2000) Nature , vol.408 , pp. 440
- Pavesi, L.¹ Negro, L.D.² Mazzoleni, C.³ Franzò, G.⁴ Priolo, F.⁵

7
- 0033895969
- G. Franzò, F. Iancona, C. Spinella, S. Cammarata, and M. Grimaldi, Materials Science and Engineering B, vol. 69-70, p. 454, 2000.
- (2000) Materials Science and Engineering B , vol.69-70 , pp. 454
- Franzò, G.¹ Iancona, F.² Spinella, C.³ Cammarata, S.⁴ Grimaldi, M.⁵

8
- 0036723499
- P. Mishra and K. Jain, Materials Science and Engineering B, vol. 95, p. 202, 2002.
- (2002) Materials Science and Engineering B , vol.95 , pp. 202
- Mishra, P.¹ Jain, K.²

9
- 0000112428
- M. Boudreau, M. Boumerzoug, P. Mascher, and P. Jessop, Applied Physics Letters, vol. 63, p. 3014, 1993.
- (1993) Applied Physics Letters , vol.63 , pp. 3014
- Boudreau, M.¹ Boumerzoug, M.² Mascher, P.³ Jessop, P.⁴

10
- 18844461093
- To be published in the
- th Annual Tech. Proc., 2004.
- (2004) th Annual Tech. Proc.
- Roschuk, T.¹ Wojcik, J.² Mascher, P.³

11
- 0031535906
- A. Sassella, A. Borghesi, F. Corni, A. Monelli, G. Ottaviana, R. Tonini, B. Pivac, M. Bacchetta, and L. Zanotti, J. Vac. Sci. Technol. A, vol. 15, p. 377, 1997.
- (1997) J. Vac. Sci. Technol. a , vol.15 , pp. 377
- Sassella, A.¹ Borghesi, A.² Corni, F.³ Monelli, A.⁴ Ottaviana, G.⁵ Tonini, R.⁶ Pivac, B.⁷ Bacchetta, M.⁸ Zanotti, L.⁹

12
- 33847571146
- P. G. Pai, S. S. Chao, Y. Takagi, and G. Lucovsky, J. Vac. Sci. Technol. A, vol. 4, p. 689, 1986.
- (1986) J. Vac. Sci. Technol. A , vol.4 , pp. 689
- Pai, P.G.¹ Chao, S.S.² Takagi, Y.³ Lucovsky, G.⁴

13
- 0001154525
- J. T. Finch, G. Lucovsky, E. Kobeda, and E. A. Irene, J. Vac. Sci. Technol. B, vol. 7, p. 153, 1989.
- (1989) J. Vac. Sci. Technol. B , vol.7 , pp. 153
- Finch, J.T.¹ Lucovsky, G.² Kobeda, E.³ Irene, E.A.⁴

* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.