Hybrid-mounted micromachined aluminum hotwires for wall shear-stress measurements

Journal of Microelectromechanical Systems

Volumn 14, Issue 2, 2005, Pages 254-260

  Haasl, Sjoerd ^a   Mucha, Dirk ^a,b   Chernoray, Valery ^d   Ebefors, Thorbjörn ^a,c   Enoksson, Peter ^a,d   Löfdahl, Lennart ^d   Stemme, Göran ^a  

^a ROYAL INSTITUTE OF TECHNOLOGY   (Sweden)

^b FRAUNHOFER INSTITUTE FOR PRODUCTION SYSTEMS AND DESIGN TECHNOLOGY IPK   (Germany)

^c Silex Microsystems   (Sweden)

^d CHALMERS UNIVERSITY OF TECHNOLOGY   (Sweden)

Author keywords

Aluminum; Anemometers; Assembly; Hotwire; Microassembly; Microsensors; Wall shear stress

Indexed keywords

ALUMINUM; ANEMOMETERS; ASSEMBLY; ELECTRIC CURRENT MEASUREMENT; FABRICATION; MECHANICAL VARIABLES MEASUREMENT; MICROMACHINING; MICROSENSORS; SHEAR STRESS; VOLTAGE MEASUREMENT;

ANENOMETER SENSOR; HOTWIRE; MICROASSEMBLY; SHEAR STRESS MEASUREMENT; WALL SHEAR STRESS;

MICROELECTROMECHANICAL DEVICES;

EID: 18844373064     PISSN: 10577157     EISSN: None     Source Type: Journal    
DOI: 10.1109/JMEMS.2004.839029     Document Type: Article

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