Surface micromachined thermal shear stress sensor

American Society of Mechanical Engineers, Fluids Engineering Division (Publication) FED

Volumn 197, Issue , 1994, Pages 9-15

  Liu, Chang ^a   Tai, Yu Chong ^a   Huang, Jin Biao ^a   Ho, Chih Ming ^a  

^a CALIFORNIA INSTITUTE OF TECHNOLOGY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ACTUATORS; MICROELECTROMECHANICAL DEVICES; MICROMACHINING; SENSITIVITY ANALYSIS; SHEAR STRESS; THERMISTORS;

THERMAL SHEAR STRESS SENSORS; UNIVERSITY RESEARCH INSTITUTE;

SENSORS;

EID: 0028744994     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (0)