A surface micromachined, out-of-plane anemometer

Proceedings of the IEEE Micro Electro Mechanical Systems (MEMS)

Volumn , Issue , 2002, Pages 332-335

  Chen, Jack ^a   Zou, Jun ^a   Liu, Chang ^a  

^a UNIVERSITY OF ILLINOIS AT URBANA CHAMPAIGN   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ANEMOMETERS; BOUNDARY LAYER FLOW; FLOW MEASUREMENT; INTEGRATED CIRCUIT LAYOUT; INTERFACES (MATERIALS); MICROELECTROMECHANICAL DEVICES; NICKEL; PLATINUM; SEMICONDUCTOR DEVICE MANUFACTURE; SUBSTRATES; THERMAL INSULATION; THIN FILMS;

HOT WIRE ANEMOMETER; SENSING FILAMENT; SURFACE MICROMACHINING; TEMPERATURE COEFFICIENT OF RESISTANCE; TEMPERATURE SENSOR;

SENSORS;

EID: 0036118084     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (7)

1. A micromachined polysilicon hot-wire anemometer
2. Three dimensional silicon triple hot wire anemometer based on polyimide joints
3. Low-cost flow transducer fabricated with the AMANDA-process
4. Plastic deformation magnetic assembly (PDMA) of out-of-plane microstructures: Technology and application
5. Pyralin polyimide coating for electronics: P12610 series - Product information and process guidelines