Advanced technique for broadband on-wafer RF device characterization

63rd ARFTG Conference Digest, Spring 2004, Automatic RF Techniques Group: On Wafer Characterization

Volumn , Issue , 2004, Pages 83-90

  Scholz, René F ^a   Korndörfer, Falk ^a   Senapati, Biswanath ^a   Rumiantsev, Andrej ^b  

^a IHP   (Germany)

^b SUSS MicroTec Lithography GmbH   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

CALIBRATION; CHARACTERIZATION; EMBEDDED SYSTEMS; SCATTERING PARAMETERS; STANDARDIZATION; WSI CIRCUITS;

2-PORT ON-WAFER RF DEVICE; DE-EMBEDDING; ON-WAFER CALIBRATION; PORT-TO-PORT;

BROADBAND NETWORKS;

EID: 18844370595     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

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