Advanced on-wafer multiport calibration methods for mono- And mixed-mode device characterization

63rd ARFTG Conference Digest, Spring 2004, Automatic RF Techniques Group: On Wafer Characterization

Volumn , Issue , 2004, Pages 91-95

  Heuermann, Holger ^a   Rumiantsev, Andrej ^b   Schott, Steffen ^b  

^a AACHEN UNIVERSITY OF APPLIED SCIENCES   (Germany)

^b SUSS MicroTec Lithography GmbH   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ALGORITHMS; CALIBRATION; CHARACTERIZATION; ERROR CORRECTION; INTERFACES (COMPUTER); QUALITY CONTROL; REFLECTOMETERS; STANDARDS; VECTORS;

ON-WAFER MEASUREMENT DATA; SELF-CALIBRATION PROCEDURES; TWO-PORT CALIBRATION; VECTOR NETWORK ANALYZER (VNA);

WSI CIRCUITS;

EID: 18844423489     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (21)

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