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Volumn 86, Issue 5, 2005, Pages 1-3

Estimation of residual nitrogen concentration in semi-insulating 4H-SiC via low temperature photoluminescence

Author keywords

[No Author keywords available]

Indexed keywords

LOW TEMPERATURE PHOTOLUMINESCENCE; PHOTO-NEUTRALIZATION; RESIDUAL NITROGEN CONCENTRATION; SUBLINEAR BEHAVIORS;

ELECTRIC INSULATION; FUNCTIONS; PHOTOLUMINESCENCE; SECONDARY ION MASS SPECTROMETRY; SILICON CARBIDE; SUBSTRATES;

NITROGEN;

EID: 18744413025 PISSN: 00036951 EISSN: None Source Type: Journal
DOI: 10.1063/1.1857079 Document Type: Article

Times cited : (10)

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