X-ray diffuse scattering from defects in nitrogen-doped Czochralski grown silicon wafers

Journal of Physics D: Applied Physics

Volumn 38, Issue 10 A, 2005, Pages

  Klang, P ^a   Holy V ^a,b   Kubena J ^a   Stoudek R ^a   Sik J ^c  

^a MASARYK UNIVERSITY   (Czech Republic)

^b CHARLES UNIVERSITY   (Czech Republic)

^c ON SEMICONDUCTOR   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

AGGLOMERATION; CRYSTAL DEFECTS; DOPING (ADDITIVES); MATHEMATICAL MODELS; NITROGEN; SILICON WAFERS; X RAY SCATTERING;

DEFECT DEFORMATION FIELDS; FLOATING ZONE (FZ); SELECTIVE ETCHING; SILICON CRYSTALS;

CRYSTAL GROWTH FROM MELT;

EID: 18744370455     PISSN: 00223727     EISSN: None     Source Type: Journal    
DOI: 10.1088/0022-3727/38/10A/020     Document Type: Article

References (18)

1. Newman R C 2000 J. Phys.: Condens. Matter 12 R335
2. Rozgonyi G A 2002 Electrochem. Soc. Proc. 2002-2 149
3. Voronkov V V and Falster R 2002 J. Electrochem. Soc. 149 G167
4. Yang D, Ma X, Fan R, Zhang J, Li L and Que D 1999 Physica B 273-274 308
5. Akatsuka M and Sueoka K 2001 Japan. J. Appl. Phys. 40 1240
6. Krivoglaz M A 1996 Diffraction of X-Rays and Neutrons in Nonideal Crystals (Berlin: Springer)
7. Šik J, Lorenc M and Štoudek R 2002 Proc. 8th Scientific and Business Conf. SILICON 2002, Rožnov pod Radhostěm p 125
8. F 1239, American Society for Testing Materials ASTM International 2002
9. F 1188, American Society for Testing Materials ASTM International 2002
10. Štoudek R and Humlíček J 2004 WDS'04 Proc. of Contributed Papers (Prague: MATFYSPRESS)
11. Hu S M 1980 J. Appl. Phys. 51 5945
12. Dederichs P H and Pollman J 1972 Z. Phys. 255 315
13. Burgers J M 1939 Proc. Acad. Sci., Amsterdam 42 293
14. Burgers J M 1939 Proc. Acad. Sci., Amsterdam 42 278
15. Larson B C and Schmatz W 1980 Phys. Status Solidi b 99 267
16. Charnyi L A, Sherbachev K D and Bublik V T 1991 Phys. Status Solidi a 128 303
17. Holý V, Pietsch U and Baumbach T 1998 High-Resolution X-Ray Scattering from Thin Films and Multilayers (Berlin: Springer)
18. Sangwal K 1987 Etching of Crystals (Amsterdam: North-Holland)