Excimer ablation of ITO on flexible substrates for large format display applications

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 4637, Issue , 2002, Pages 90-101

  Ghandour, Osman A ^a   Constantinide, Dan ^a   Sheets, Ron ^a  

^a Tamarack Scientific Co   (United States)

Author keywords

Ablation; Cost reduction; Display; Excimer; Flexible substrates; Fluence gradient; ITO; Large format; Pattern projection; Scan and repeat; SEM

Indexed keywords

ELECTRONICS PACKAGING; EXCIMER LASERS; IMAGE QUALITY; INDIUM COMPOUNDS; MASKS; OPTIMIZATION; POLYETHYLENE TEREPHTHALATES; PROJECTION SYSTEMS; SCANNING ELECTRON MICROSCOPY; SUBSTRATES; THIN FILMS;

EXCIMER-BASED MASK PATTERN PROJECTION SYSTEMS; FLEXIBLE SUBSTRATE DISPLAY PACKAGING;

LASER ABLATION;

EID: 0036405160     PISSN: 0277786X     EISSN: None     Source Type: Journal    
DOI: 10.1117/12.470610     Document Type: Article

References (17)

1. E. Lueder, "Liquid Crystal Displays with Plastic Substrates", Conference on Liquid Crystal Materials, Devices, and Applications, Robert Shasidhar, Proc. SPIE 3297, 64-72, SPIE, 1998.
2. P. Mach, S.J. Rodriguez, R. Nortrup, P. Wiltzius, and J.A. Rogers, "Monolithically Integrated, Flexible Display of Polymer-dispersed Liquid Crystal Driven by Rubber-stamped Organic Thin-film Transistors", Appl. Phys. Lett, 78, 3592-3594, 2001.
3. A.R. Forouhi, G.G. Li, and I. Bloomer, "Optical Characterization of ITO Films Used in Flat Panel Displays", Susan K. Jones, Proc. SPIE 2725, 471-475, SPIE, 1996.
4. I. Kenji Nishiguchi, K. Maskazu Okada, S. Kiyofumi Hashimoto, U.S. Patent No. 6,226,067.
5. S.C. Tam, Y.H. Chen, H.Y. Zheng, and W.L. Chen," Scribing of ITO-Coatings Using a Q-Switched Nd:YAG Laser", Microelectronic Packaging and Laser Processing, Yong Khim Swee, Hong Yu Zheng, Ray T. Chen, Proc. SPIE 3184, 186-194, SPIE, 1997.
6. P. Rumsby, E. Harvey, D. Thomas, and N. Rizvi, "Excimer Laser Patterning of Thick and Thin Films for High Density Packaging", Microelectronic Packaging and Laser Processing, Yong Khim Swee, Hong Yu Zheng, Ray T. Chen, Proc. SPIE 3184, 176-185, SPIE, 1997.
7. Tamarack Scientific Co., Inc., product brochure on Excimer Laser Ablation Systems.
8. Ronald E. Sheets, "Scanning projection for large-area lithography", Microlithography World (feature paper), PennWell Publishing Company, 1996.
9. S.J. Kirch, J.R. Lankard, J.J. Ritsko, K.A. Smith, J.L. Speidell, and J.T. Yeh, U.S. Patent No. 4,923,772.
10. R.S. Patel, T.F. Redmond, C. Tessler, D. Tudryn, and D. Pulaski, "Laser Via Ablation Technology for MCM-D Fabrication at IBM Microelectronics", The International Journal of Microcircuits and Electronic Packaging, Volume 18, Number 3, 266-274, Third Quarter 1995.
11. J.C. Koo, V.J. Zaleckas, U.S. Patent No. 4,081,653.
12. W.W. Duley, UV Lasers: Effects & Applications in Materials Science, Chapter 2, Cambridge University Press, Cambridge, 1996.
13. Y.S. Liu, H.S. Cole, H.R. Philipp, and R. Guida, "Photo-etching of Polymers with Excimer Lasers", Lasers in Microlithography, Daniel J. Ehrlich, Proc. SPIE 774, 133-137, SPIE, Santa Clara, 1987.
14. James R. Sheats, Bruce W. Smith, Microlithography Science and Technology, Chapter 4, Marcel Dekker, Inc., New York, 1998.
15. P.M. Smith, P.G. Carey, and T.W. Sigmon, "Excimer laser crystallization and doping of silicon films on plastic substrates", Appl. Phys. Lett, 70, 342-344, 1997.
16. M.O. Thompson, "Liquid-Solid Interface Dynamics During Pulsed Laser Melting of Silicon-on-Sapphire", Ph.D. thesis, Cornell University, 1984.
17. ATS Eco-Snow Systems, Inc., product brochure.