Micromachining of silicon by short-pulse laser ablation in air and under water

Materials Science and Engineering: A

Volumn 372, Issue 1-2, 2004, Pages 145-162

  Choo, K L ^a   Ogawa, Y ^a   Kanbargi, G ^a   Otra, V ^a   Raff, L M ^b   Komanduri, R ^a  

^a Oklahoma State University   (United States)

^b OKLAHOMA STATE UNIVERSITY   (United States)

Author keywords

MEMS; Micromachining; Short pulse laser ablation

Indexed keywords

DRILLING; LASER ABLATION; MICROMACHINING; SCANNING ELECTRON MICROSCOPY; SIGNAL INTERFERENCE; THRESHOLD ELEMENTS;

ABLATION DEPTH; LASER ENERGY; LASER INTERFERENCE MICROSCOPE; SHORT-PULSE;

SILICON;

LASER;

EID: 2142640932     PISSN: 09215093     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.msea.2003.12.021     Document Type: Article

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