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Volumn 37, Issue 6, 2005, Pages 388-393
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Preparation of large area sub-50 nm polymer nanoring arrays
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Author keywords
Data storage; Electron beam lithography; Nanorings
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Indexed keywords
ATOMIC FORCE MICROSCOPY;
DATA STORAGE EQUIPMENT;
ELECTRON BEAM LITHOGRAPHY;
GROUND STATE;
HIGH RESOLUTION ELECTRON MICROSCOPY;
POLYMETHYL METHACRYLATES;
SCANNING ELECTRON MICROSCOPY;
SEMICONDUCTING GALLIUM ARSENIDE;
SEMICONDUCTING POLYMERS;
SEMICONDUCTING SILICON;
SEMICONDUCTOR SUPERLATTICES;
HIGH RESOLUTION SCANNING ELECTRON MICROSCOPY (HR-SEM);
MAGNETIC GROUND STATES;
MULTILAYERED RESISTS;
NANORINGS;
NANOSTRUCTURED MATERIALS;
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EID: 18644381393
PISSN: 07496036
EISSN: None
Source Type: Journal
DOI: 10.1016/j.spmi.2005.01.006 Document Type: Article |
Times cited : (11)
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References (13)
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