Fabrication of high density dot lattices with electron beam lithography

Phase Transitions

Volumn 78, Issue 1-3, 2005, Pages 105-113

  Stahlmecke, B ^a   Dumpich, G ^a  

^a UNIVERSITY OF DUISBURG ESSEN   (Germany)

Author keywords

Electron beam lithography; Nanodot array

Indexed keywords

ATOMIC FORCE MICROSCOPY; MAGNETIC ANISOTROPY; MAGNETIC FIELDS; MAGNETIC HYSTERESIS; MAGNETOMETERS; MASKS; MULTILAYERS; POLYMETHYL METHACRYLATES; QUARTZ; SCANNING ELECTRON MICROSCOPY; SQUIDS;

MAGNETIC DOT LATTICES; MAGNETIC MEASUREMENTS; NANODOT ARRAY; RESISTIVE HEATING;

ELECTRON BEAM LITHOGRAPHY;

EID: 12344297351     PISSN: 01411594     EISSN: None     Source Type: Journal    
DOI: 10.1080/01411590412331316717     Document Type: Conference Paper

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