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Applied Physics A: Materials Science and Processing

Volumn 80, Issue 7, 2005, Pages 1553-1562

Experimental and numerical investigations of heat transport and crystallization kinetics in laser-induced modification of barium strontium titanate thin films

(2) Baldus, O a Waser, R b

a KARLSRUHE INSTITUTE OF TECHNOLOGY (Germany)

b FORSCHUNGSZENTRUM JÜLICH (Germany)

Author keywords

[No Author keywords available]

Indexed keywords

AMORPHOUS FILMS; BARIUM COMPOUNDS; CAPACITORS; CERAMIC MATERIALS; COATING TECHNIQUES; COMPUTER SIMULATION; CRYSTALLIZATION; LASER APPLICATIONS; MICROELECTRONICS; PERMITTIVITY; PLATINUM; REACTION KINETICS; SILICON WAFERS; STOICHIOMETRY; THIN FILM DEVICES; ULTRAVIOLET RADIATION;

BARIUM STRONTIUM TITANATE (BST); CRYSTALLIZATION KINETICS; FILM THICKNESS; HEAT TRANSPORT;

THIN FILMS;

EID: 18644362299 PISSN: 09478396 EISSN: None Source Type: Journal
DOI: 10.1007/s00339-004-2904-7 Document Type: Article

Times cited : (14)

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