Laserannealing studies of barium strontium titanate thin films using short laser pulses

Integrated Ferroelectrics

Volumn 30, Issue 1-4, 2000, Pages 129-138

  Baldus, O ^a   Krasser, W ^a   Hoffmann, S ^a   Waser, R ^a   Kreutz, E W ^b  

^a FORSCHUNGSZENTRUM JÜLICH   (Germany)

^b RWTH AACHEN UNIVERSITY   (Germany)

Author keywords

(Ba,Sr)TiO3; Laser crystallization annealing; Temperature profiles; UV light pulses

Indexed keywords

ANNEALING; BARIUM COMPOUNDS; CRYSTALLIZATION; EXCIMER LASERS; FINITE ELEMENT METHOD; LASER PULSES; MATHEMATICAL MODELS; TEMPERATURE;

BARIUM STRONTIUM TITANATE; LASER ANNEALING; MICROSTRUCTURAL ANALYTICAL METHODS; TEMPERATURE PROFILES; ULTRAVIOLET LIGHT PULSES;

THIN FILMS;

EID: 0034446167     PISSN: 10584587     EISSN: None     Source Type: Journal    
DOI: 10.1080/10584580008222261     Document Type: Conference Paper

References (10)

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