Growth of BxAl1-xN layers using decaborane on SiC substrates

Journal of Crystal Growth

Volumn 278, Issue 1-4, 2005, Pages 437-442

  Nakajima, A ^a   Furukawa, Y ^a   Yokoya, H ^a   Yonezu, H ^a  

^a TOYOHASHI UNIVERSITY OF TECHNOLOGY   (Japan)

Author keywords

A1. Solubility; A2. Single crystal growth; B1. Nitride; B2. Semiconducting ternary compounds

Indexed keywords

COMPOSITION EFFECTS; CRYSTAL GROWTH; MOLECULAR BEAM EPITAXY; NITRIDES; NITROGEN; PYROLYSIS; SILICON CARBIDE; SINGLE CRYSTALS; SOLUBILITY; SUBSTRATES; SURFACE ROUGHNESS; TERNARY SYSTEMS;

DECARBORANE; PLASMA-ASSISTED MOLECULAR BEAM EPITAXY; SEMICONDUCTING TERNARY COMPOUNDS; SINGLE-CRYSTAL GROWTH;

BORON COMPOUNDS;

EID: 18544388396     PISSN: 00220248     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.jcrysgro.2005.01.003     Document Type: Conference Paper

References (17)

1. H. Amano, N. Sawaki, I. Akasaki, and Y. Toyoda Appl. Phys. Lett. 48 1986 363
2. S. Nakamura, M. Senoh, S. Nagahama, N. Iwasa, T. Yamada, T. Matsushita, H. Kiyoku, Y. Sugimoto, T. Kozaki, H. Umemoto, M. Sano, and K. Chocho Appl. Phys. Lett. 72 1998 211
3. S. Sakai, Y. Ueta, and Y. Terauchi Jpn. J. Appl. Phys. 32 1993 4413
4. M. Haruyama, T. Shirai, H. Kawanishi, Y. Suematsu, Proceedings of the International Symposium on Blue Laser and Light Emitting Diodes, 1996, p. 106.
5. V. Vezin, S. Yatagai, H. Shiraki, and S. Uda Jpn. J. Appl. Phys. 36 1997 L1483
6. V.K. Gupta, C.C. Wamsley, M.W. Koch, and G.W. Wicks J. Vac. Sci. Technol. B17 1999 1246
7. A.Y. Polyakov, M. Shin, W. Qian, and M. Skowronski J. Appl. Phys. 81 1997 1715
8. C.H. Wei, Z.Y. Xie, J.H. Edgar, K.C. Zeng, J.Y. Lin, H.X. Jiang, C. Ignatiev, J. Chaudhuri, and D.N. Braski J. Nitride Semicond. Res. 4S1 1999 G3.79
9. T. Takano, M. Kurimoto, J. Yamamoto, and H. Kawanishi J. Crystal Growth 237-239 2002 972
10. C.H. Wei, and J.H. Edgar J. Crystal Growth 208 2002 179
11. L.K. Teles, L.M.R. Scolfaro, and J.R. Leite Appl. Phys. Lett. 80 2002 1177
12. A. Nakajima, Y. Furukawa, S. Koga, and H. Yonezu J. Crystal Growth 265 2004 351
13. J.C. Phillips Bonds and Bands in Semiconductors 1973 Academic Press New York
14. E. de Frésart, S.S. Rhee, and K.L. Wang Appl. Phys. Lett. 49 1986 847
15. T. Tatsumi, H. Hirayama, and N. Aizaki Appl. Phys. Lett. 50 1987 1234
16. Y. Utsumi Appl. Phys. Lett. 67 1995 992
17. Callery Chemical Company, Technical Bulletin No. CM-070, 1971.