Growth of AlBN solid solutions by organometallic vapor-phase epitaxy

Journal of Applied Physics

Volumn 81, Issue 4, 1997, Pages 1715-1719

  Polyakov, A Y ^a   Shin, M ^a   Qian, W ^a,c   Skowronski, M ^a   Greve, D W ^a   Wilson, R G ^b  

^a CARNEGIE MELLON UNIVERSITY   (United States)

^b Hughes Aircraft Co   (United States)

^c NORTHWESTERN UNIVERSITY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0001194322     PISSN: 00218979     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.364066     Document Type: Article

References (22)

1. S. Nakamura, M. Senoh, S. Nagahama, N. Iwasa, T. Yamada, T. Matsushita, H. Kioyoku, and Y. Sugimoto, Jpn. J. Phys. 35, L74 (1996).
2. S. Nakamura, M. Senoh, S.-I. Nagahama, N. Iwasa, T. Yamada, T. Matsushita, H. Kiyoku, and Y. Sugimoto, Appl. Phys. Lett. 68, 2105 (1996).
3. H. Morkoç, S. Strite, G. B. Gao, M. E. Lin, B. Sverdlov, and M. Burns, J. Appl. Phys. 76, 1363 (1994).
4. S. Strite and H. Morkoç J. Vac. Sci. Technol. B 10, 1237 (1992).
5. R. F. Davis J. Vac. Sci. Technol. A 11, 829 (1992).
6. B. Heying, X. H. Wu, S. Keller, Y. Li, D. Kapolnek, B. P. Keller, S. P. DenBaars, and J. S. Speck, Appl. Phys. Lett. 68, 643 (1996).
7. S. Sakai, Y. Ueta, and Y. Terauchi, Jpn. J. Phys. 32, 4413 (1993).
8. M. Haruyama, T. Shirai, H. Kawanishi, and Y. Suematsu, in Proceedings International Symposium of the on Blue Lasers and Light Emitting Diodes, Chiba University Japan, March 1996, p. 106.
9. A. J. Noreika and M. H. Francombe, J. Vac. Sci. Technol. B 2, 722 (1969).
10. K. Nakamura, J. Electrochem. Soc. 133, 1120 (1986).
11. H. M. Manasevit, W. B. Hewitt, A. J. Nelson, and A. R. Mason, J. Electrochem. Soc. 136, 3070 (1989).
12. H. Amano, I. Akasaki, K. Hiramatsu, N. Koide and N. Sawaki, Thin Solid Films 163, 415 (1988).
13. R. G. Wilson, F. A. Stevie, and C. W. Magee, Secondary Ion Mass Spectrometry (Wiley, New York, 1989).
14. J. H. Edgar, in Properties of Group III Nitrides, edited by J. H. Edgar (INSPEC Publications, London, 1994), pp. 7-21.
15. W. J. Meng, in Ref. 14, pp. 22-19.
16. T. Akashi, H.-R. Pak, and A. B. Sawaoka, J. Mater. Sci. 21, 4060 (1986).
17. A. Onodera, K. Inoue, H. Yoshihara, H. Nakae, T. Matsuda, and T. Hirai, J. Mater. Sci. 25, 4279 (1990).
18. M. Ueno, K. Hasegawa, R. Oshima, A. Onodera, O. Shimomura, K. Takemura, H. Nakae, T. Matsuda, and T. Harai, 18, 10 226 (1992).
19. V. L. Solozhenko, in Properties of Group III Nitrides, edited by J. H. Edgar (INSPEC Publications, London, 1994),pp. 43-70.
20. Sh.-I. Hirano, T. Yamaguchi, and S. Naka, J. Am. Ceram. Soc. 64, 734 (1981).
21. S. Naka, in Fine Ceramics, edited by S. Saito (Elsevier, New York, 1988), pp. 1-14.
22. A. Y. Polyakov, M. Shin, M. Skowronski, D. W. Greve, R. G. Wilson, A. V. Govorkov, and R. M. Desrosiers, in the abstracts of Electron Materials Conference, Santa Barbara, June 1996, paper CC9.