A rate equation approach to the gas sensitivity of thin film metal oxide materials

Sensors and Actuators, B: Chemical

Volumn 107, Issue 2, 2005, Pages 587-599

  Ahlers, S ^a   Muller G ^a   Doll, T ^b  

^a AIRBUS GROUP INNOVATIONS   (Germany)

^b IMM Institut Für Mikrotechnologie Mainz GmbH   (Germany)

Author keywords

Adsorption; Metal oxide; Modeling; Thin film

Indexed keywords

ADSORBENTS; ADSORPTION; CHEMICAL SENSORS; DESORPTION; ELECTRON BEAMS; EVAPORATION; MATHEMATICAL MODELS; MORPHOLOGY; OXIDES; OXYGEN; REACTION KINETICS; THERMAL EFFECTS;

DIFFUSION-REACTION THEORY; METAL OXIDES; MODELING; RATE EQUATIONS;

THIN FILM DEVICES;

EID: 18544387738     PISSN: 09254005     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.snb.2004.11.020     Document Type: Article

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