Stress and interfacial defects induced by amorphous carbon film growth on silicon

Diamond and Related Materials

Volumn 14, Issue 3-7, 2005, Pages 1036-1040

  Macchi, C ^a   Mariazzi, S ^a   Zecca, A ^a   Karwasz, G P ^a   Brusa, R S ^a   Laidani, N ^b   Bartali, R ^b   Gottardi, G ^b   Anderle, M ^b  

^a UNIVERSITY OF TRENTO   (Italy)

^b ITC IRST   (Italy)

Author keywords

Amorphous hydrogenated carbon; Defect characterization; Mechanical properties; Physical vapour deposition

Indexed keywords

CARBON; FILM GROWTH; HARDNESS; PHYSICAL VAPOR DEPOSITION; POSITRON ANNIHILATION SPECTROSCOPY; SILICON; SPUTTER DEPOSITION; STRESS ANALYSIS; SUBSTRATES;

AMORPHOUS HYDROGENATED CARBON; DEFECT CHARACTERIZATION; INTERFACIAL DEFECTS; POSITRON IMPLANTATION;

AMORPHOUS FILMS;

EID: 18544367210     PISSN: 09259635     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.diamond.2004.10.010     Document Type: Conference Paper

References (21)

1. H. Feller, A. Hempel, J. Lilge, and H.P. Lorenz Diamond Relat. Mater. 1 1992 563
2. A. Thornton, and D.W. Hoffman Thin Solid Films 171 1989 5
3. Y. Cheng, Y. Wu, J. Chen, D. Xu, X. Qiao, and C. Xie Surf. Coat. Technol. 111 1999 141
4. M.A. Tamor, W.C. Vassell, and K.R. Carduner Appl. Phys. Lett. 58 1991 592
5. S. Logothetidis, and M. Gioti Mater. Sci. Eng., B 46 1997 119
6. P.C. Keliers Diamond Relat. Mater. 10 2001 139
7. Y.H. Cheng, Y.P. Wu, J.G. Chen, X.L. Qiao, and C.S. Xie Diamond Relat. Mater. 8 1999 1214
8. F.L. Freire Jr., G. Mariotto, and C.A. Achete Surf. Coat. Technol. 74 1995 75
9. M.K. Puchert, P.Y. Timbrell, R.N. Lamb, and D.R. McKenzie J. Vac. Sci. Tecnol., A 12 1994 727
10. P.C. Kelires, M. Gioti, and S. Logothetidis Phys. Rev., B 59 1999 5074
11. A. Heiman, E. Lakin, E. Zolotoyabko, and A. Hoffman Diamond Relat. Mater. 11 2002 601
12. N.B. Colthup, L.H. Daly, and S.E. Wiberley Introduction to Infrared and Raman Spectroscopies 1969 Academic Press New York
13. B. Dischler, A. Bubenzer, and P. Koidl Solid State Commun. 48 1983 105
14. A. Zecca, M. Bettonte, J. Paridaens, G.P. Karwasz, and R.S. Brusa Meas. Sci. Technol. 9 1998 1
15. P. Asoka-Kumar, K.G. Lynn, and D.O. Welch J. Appl. Phys. 76 1994 4935
16. R.S. Brusa, G.P. Karwasz, N. Tiengo, A. Zecca, F. Corni, G. Ottaviani, and R. Tonini Phys. Rev., B 61 2000 10154
17. A. van Veen, H. Schut, J. de Vries, R.A. Hakvoort, and M.R. Ijpma Peter J. Schultz Guiti R. Massoumi Peter J. Simpson AIP Conf. Proc. 218, Positron Beams for Solids and Surfaces, London Ontario 1990 171
18. H.S. Leipner, V.V. Mikhnoich Jr., V. Bondarenko, Z. Wang, H. Gu, R. Krause-Rehberg, J.-L. Demenet, and J. Rabier Physica B 340-342 2003 617
19. R. Krause-Rehberg, and H.S. Leipner "Positron Annihilation in Semi-conductors" Defect Studies Springer series in Solid State Science 1999 Springer-Verlag Berlin Heidelberg 114
20. R.S. Brusa, W. Deng, G.P. Karwasz, A. Zecca, and D. Pliszka Appl. Phys. Lett. 79 2001 1492
21. S. Zhang, H.T. Johnson, G.J. Wagner, W.K. Liu, and K.J. Hsia Acta Mater. 51 2003 5211