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Volumn 78, Issue 2-4, 2005, Pages 361-366

Ion-beam formation of nanopores and nanoclusters in SiO2

Author keywords

Ion irradiation; Latent tracks etching; Silicon dioxide

Indexed keywords

ETCHING; ION BEAMS; ION IMPLANTATION; NANOSTRUCTURED MATERIALS; POROUS MATERIALS; SCANNING ELECTRON MICROSCOPY; TRANSMISSION ELECTRON MICROSCOPY;

AMORPHOUS NANOCLUSTERS; ION IRRADIATION; LATENT TRACKS ETCHING; MULTI-POROUS ALUMINA;

SILICA;

EID: 18444391492 PISSN: 0042207X EISSN: None Source Type: Journal
DOI: 10.1016/j.vacuum.2005.01.050 Document Type: Conference Paper

Times cited : (16)

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