Growth of AlN on Etched 6H-SiC(0001) Substrates via MOCVD

Physica Status Solidi (A) Applied Research

Volumn 188, Issue 2, 2001, Pages 783-787

  Hageman, W ^a   Xie, Z ^a   Edgar, J ^a   Zhuang, D ^a   Jagganathan, S ^b   Barghout, K ^b   Chaudhuri, J ^b   Rys, A ^a   Schmitt, J ^a  

^a Kansas State University   (United States)

^b Wichita State University   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 1842786673     PISSN: 00318965     EISSN: None     Source Type: Journal    
DOI: 10.1002/1521-396X(200112)188:2<783::AID-PSSA783>3.0.CO;2-W     Document Type: Article

References (10)

1. V. TORRES, M. STEVENS, J. EDWARDS, D. SMITH, R. DOAK, and I. TSONG, Appl. Phys. Lett. 71, 1365 (1997).
2. S. TANAKA, R. KERN, J. BENTLEY, and R. DAVIS, Jpn. J. Appl. Phys. 35, 1641 (1996).
3. B. SVERDLOV, G. MARTIN, H. MORKOC, and D. SMITH, Appl. Phys. Lett. 67, 2063 (1995).
4. D. SMITH, S. TSEN, B. SVERDLOV, G. MARTIN, and H. MORKOC, Solid-State Electron. 41, 349 (1997).
5. S. TANAKA, R. KERN, and R. DAVIS, Appl. Phys. Lett. 66, 37 (1995).
6. F. OWMAN, C. HALLIN, P. MARTENSSON, and E. JANZEN, J. Cryst Growth 167, 391 (1996).
7. J. POWELL, D. LARKIN, and A. TRUNEK, Mater. Sci. Forum 264-268, 421 (1998).
8. Z. XIE, C. WEI, L. LI, Q. YU, and J. EDGAR, J. Cryst. Growth 217, 115 (2000).
9. M. HORDON and B. AVERBACK, Acta Metall. 9, 237 (1961).
10. D. SMITH, D. CHANDRASEKHAR, B. SVERDLOV, A. BOTCHKAREV, A. SALVADOR, and H. MORKOC, Appl. Phys. Lett. 67, 1830 (1995).