Dynamic analysis of an electrostatic micropump

2000 International Conference on Modeling and Simulation of Microsystems - MSM 2000

Volumn , Issue , 2000, Pages 632-635

  Jiang, T Y ^a   Ng, T Y ^a   Lam, K Y ^a  

^a NATIONAL UNIVERSITY OF SINGAPORE   (Singapore)

Author keywords

Assumed mode method; Dynamic analysis; Electro mechanical coupling; Electrostatic force; Micropump; Three dimensional boundary element method

Indexed keywords

ASSUMED-MODE METHOD; DYNAMIC ANALYSIS; ELECTRO MECHANICAL COUPLING; ELECTROSTATIC FORCE; ELECTROSTATIC MICROPUMPS; THREE DIMENSIONAL BOUNDARY ELEMENT METHOD;

BOUNDARY ELEMENT METHOD; ELASTIC MODULI; ELECTROSTATICS; INTEGRAL EQUATIONS; LAPLACE TRANSFORMS; MICROACTUATORS; MICROSTRUCTURE;

MICROELECTROMECHANICAL DEVICES;

EID: 6344285060     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (10)

1. Fan Shi, Palghat Ramesh and Subrata Mukherjee, Dynamic Anlysis of Micro-electromechanical Systems, Int. J. for Numerical Methods in Engineering, Vol. 39, 4119-4319 (1996).
2. M. Kaltenbacher, H.Landes, R.Lerch and F.Lindinger, A Finite-Element /Boundary-Element Method for the Simulation of Coupled Electrostatic-Mechanical Systems, J.Phys. III France & (1997) 1975-1982.
3. M Carmona, S Marco, J Samitier and J R Morante, Dynamic simulations of micropumps, J. Micromech. Microeng., 6 (1996) 128-130.
4. Torsten Gerlach, Helmut Wurmus, Working principle and performance of the dynamic micropump, Sensors and Actuators, A 50 (1995) 135-140.
5. R. Zengerle, J. Ulrich, S. Kluge, M. Richter, A. Richter, A bidirectional silicon micropump, Sensors and Actuators A 50 (1995) 81-86
6. P. Voigt, G. Schrag, G. Wachutka, Electrofluidic full-system modelling of a flap valve micropump based on Kirchhoffian network theory, Sensors and Actuators A 66 (1998) 9-14
7. Anders Olsson, Goran Stemme and Erik Stemme, A numerical design study of the valveless diffuser pump using a lumped-mass model, J. Micromech. Microeng. 9 (1999) 34-44
8. Tarik Bourouina, Alain Bosseboeuf and Jean-Paul Grandchamp, Design and simulation of an electrostatic micropump for drug-delivery applications, J. Micromech. Microeng. 7 (1997) 186-188
9. W.K.Schomburg, C. Goll, Design optimization of bistable microdiaphragm valves, Sensors and Actuators A 64 (1998) 259-264
10. J.N. Reddy, Theory and analysis of elastic plates, 1997