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Volumn 180-181, Issue , 2004, Pages 66-70
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Sputter-deposited amorphous-like tungsten
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Author keywords
Amorphous phase; Magnetron sputtering; Tungsten films
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Indexed keywords
ELECTRIC CONDUCTIVITY;
GRAIN SIZE AND SHAPE;
MAGNETRON SPUTTERING;
PRESSURE EFFECTS;
THERMODYNAMIC STABILITY;
THIN FILMS;
X RAY DIFFRACTION;
ISOCHRONAL HEATING;
ROOM TEMPERATURE;
PROTECTIVE COATINGS;
SPUTTERING;
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EID: 1842665100
PISSN: 02578972
EISSN: None
Source Type: Journal
DOI: 10.1016/j.surfcoat.2003.10.038 Document Type: Article |
Times cited : (42)
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References (17)
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