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Volumn 180-181, Issue , 2004, Pages 66-70

Sputter-deposited amorphous-like tungsten

Author keywords

Amorphous phase; Magnetron sputtering; Tungsten films

Indexed keywords

ELECTRIC CONDUCTIVITY; GRAIN SIZE AND SHAPE; MAGNETRON SPUTTERING; PRESSURE EFFECTS; THERMODYNAMIC STABILITY; THIN FILMS; X RAY DIFFRACTION;

EID: 1842665100     PISSN: 02578972     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.surfcoat.2003.10.038     Document Type: Article
Times cited : (42)

References (17)


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.