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Volumn 49, Issue 15, 2004, Pages 2487-2494
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Dynamics and temperature dependence of etching processes of porous and barrier aluminum oxide layers
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Author keywords
Anodic aluminum oxide; Barrier oxide layer; Impedance spectroscopy; Spectroscopic ellipsometry
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Indexed keywords
ALUMINA;
ANODIC OXIDATION;
DISSOLUTION;
ELECTROLYTES;
ELLIPSOMETRY;
ETCHING;
PERMITTIVITY;
PHASE INTERFACES;
SPECTROSCOPIC ANALYSIS;
ANODIC ALUMINUM OXIDE;
BARRIER OXIDE LAYER;
ELECTROCHEMICAL IMPEDANCE SPECTROSCOPY (EIS);
SPECTROSCOPIC ELLIPSOMETRY;
ELECTROCHEMISTRY;
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EID: 1842662381
PISSN: 00134686
EISSN: None
Source Type: Journal
DOI: 10.1016/j.electacta.2004.02.003 Document Type: Article |
Times cited : (53)
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References (27)
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