Modeling acoustic agitation for enhanced development of PMMA resists

Microsystem Technologies

Volumn 9, Issue 1-2, 2003, Pages 113-118

  Nilson, R H ^a   Griffiths, S K ^a   Ting, A ^a  

^a SANDIA NATIONAL LABORATORIES   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ABSORPTION; ACOUSTIC WAVES; ACOUSTICS; ASYMPTOTIC STABILITY; BOUNDARY LAYERS; COMPUTER SIMULATION; DIFFUSION; DISSOLUTION; FUNCTIONS; HARMONIC ANALYSIS; MATHEMATICAL MODELS; NAVIER STOKES EQUATIONS;

ACOUSTIC AGITATION; LIGA TECHNOLOGY; NUMERICAL MODELS; PECLET NUMBER;

POLYMETHYL METHACRYLATES;

EID: 1842647482     PISSN: 09467076     EISSN: None     Source Type: Journal    
DOI: 10.1007/s00542-002-0212-8     Document Type: Article

References (13)

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