Acoustic agitation for enhanced development of LIGA PMMA resists

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 4174, Issue , 2000, Pages 66-76

  Nilson, R H ^a   Griffiths, S K ^a  

^a SANDIA NATIONAL LABORATORIES   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ASPECT RATIO; BOUNDARY LAYERS; DISSOLUTION; MICROSTRUCTURE; NAVIER STOKES EQUATIONS; PHOTORESISTS; REYNOLDS NUMBER; STRESS ANALYSIS; TRANSPORT PROPERTIES; ULTRASONICS; VISCOUS FLOW;

ACOUSTIC STREAMING; SONIC AGITATION; TIME-MEAN REYNOLD STRESSES;

MICROMACHINING;

EID: 0034542357     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.396462     Document Type: Conference Paper

References (12)