Kinoform X-ray lens creation in polymer materials by deep X-ray lithography

Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms

Volumn 217, Issue 3, 2004, Pages 409-416

  Nazmov, V ^a   Shabel'nikov, L ^b   Pantenburg, F J ^a   Mohr, J ^a   Reznikova, E ^a   Snigirev, A ^c   Snigireva, I ^c   Kouznetsov, S ^c   DiMichiel, M ^c  

^a KARLSRUHE INSTITUTE OF TECHNOLOGY   (Germany)

^b INSTITUTE OF MICROELECTRONICS TECHNOLOGY AND HIGH PURITY MATERIALS   (Russian Federation)

^c EUROPEAN SYNCHROTRON RADIATION FACILITY   (France)

Author keywords

Kinoform profile; PMMA resist; SU 8 resist; X ray lens; X ray lithography

Indexed keywords

ELECTROPLATING; LIGHT REFRACTION; MICROSTRUCTURE; PHOTONS; POLYMETHYL METHACRYLATES; RADIATION EFFECTS; SYNCHROTRON RADIATION; X RAY LITHOGRAPHY;

KINOFORM PROFILE; PMMA RESIST; SU-8 RESIST; X RAY LENS;

LENSES;

EID: 1842639199     PISSN: 0168583X     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.nimb.2003.11.002     Document Type: Article

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