Characterization of (Ba, Sr)RuO3 films deposited by metal organic chemical vapor deposition

Journal of Non-Crystalline Solids

Volumn 336, Issue 2, 2004, Pages 107-112

  Kim, Hyun Chul ^a   Kim, Yoon Su ^a   Kim, Young Bae ^a   Choi, Duck Kyun ^a  

^a Hanyang University   (South Korea)

Author keywords

[No Author keywords available]

Indexed keywords

ANNEALING; CURRENT DENSITY; DEPOSITION; METALLORGANIC CHEMICAL VAPOR DEPOSITION; PERMITTIVITY; PHASE TRANSITIONS; RUTHENIUM COMPOUNDS; X RAY DIFFRACTION ANALYSIS; X RAY PHOTOELECTRON SPECTROSCOPY;

FILM DEPOSITION; LIQUID DELIVERY SYSTEMS;

METALLIC FILMS;

EID: 1842609973     PISSN: 00223093     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.jnoncrysol.2004.01.004     Document Type: Article

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