Electrical properties and microstructures of Pt/Ba0-5Sr0.5TiO3/SrRuO3 capacitors

Applied Physics Letters

Volumn 70, Issue 11, 1997, Pages 1405-1407

  Izuha, Mitsuaki ^a   Abe, Kazuhide ^a   Koike, Mitsuo ^a   Takeno, Shiro ^a   Fukushima, Noburu ^a  

^a TOSHIBA CORPORATION   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

BARIUM COMPOUNDS; CURRENT VOLTAGE CHARACTERISTICS; ELECTRIC PROPERTIES; FABRICATION; MAGNETRON SPUTTERING; MICROSTRUCTURE; OXIDES; PERMITTIVITY; POLYCRYSTALLINE MATERIALS; SUBSTRATES; THIN FILMS; TRANSMISSION ELECTRON MICROSCOPY;

CURRENT VOLTAGE MEASUREMENT; FIELD EMISSION TRANSMISSION ELECTRON MICROSCOPE; LEAKAGE CURRENT DENSITY; NANOENERGY DISPERSIVE ANALYSIS X RAY APPARATUS; SEMICONDUCTOR PARAMETER ANALYZER;

CAPACITORS;

EID: 0031099120     PISSN: 00036951     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.118590     Document Type: Article

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