Force control of linear motor stages for microassembly

American Society of Mechanical Engineers, Dynamic Systems and Control Division (Publication) DSC

Volumn 72, Issue 1, 2003, Pages 615-623

  Gorman, Jason J ^a   Dagalakis, Nicholas G ^a  

^a NATIONAL INSTITUTE OF STANDARDS AND TECHNOLOGY   (United States)

Author keywords

Force control; Linear motor; Microassembly; Sliding mode control

Indexed keywords

COMPUTER SIMULATION; FORCE CONTROL; LITHOGRAPHY; MACHINE DESIGN; MECHANICAL ENGINEERING; MICROELECTROMECHANICAL DEVICES; MICROMACHINING; REACTIVE ION ETCHING; ROBOTICS; ROBUSTNESS (CONTROL SYSTEMS); SLIDING MODE CONTROL;

MICROASSEMBLY; RIPPLE FORCE EFFECTS;

LINEAR MOTORS;

EID: 1842563077     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1115/IMECE2003-42079     Document Type: Conference Paper

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