Micro-assembly of microelectromechanical components into 3-D MEMS

Canadian Journal of Electrical and Computer Engineering

Volumn 27, Issue 1, 2002, Pages 7-15

  Dechev, Nikolai ^a   Cleghorn, William L ^a   Mills, James K ^a  

^a UNIVERSITY OF TORONTO   (Canada)

Author keywords

[No Author keywords available]

Indexed keywords

CMOS INTEGRATED CIRCUITS; COMPUTER SIMULATION; DEGREES OF FREEDOM (MECHANICS); GRIPPERS; INTERFACES (COMPUTER); MANIPULATORS; ROBOTIC ARMS; ROBOTIC ASSEMBLY; SILICON WAFERS; THREE DIMENSIONAL;

MICRO-ASSEMBLY PROCESS; MICROELECTROMECHANICAL COMPONENT; MICROGRIPPER; THREE-DIMENSIONAL MICROELECTROMECHANICAL SYSTEM;

MICROELECTROMECHANICAL DEVICES;

EID: 0036304731     PISSN: 08408688     EISSN: None     Source Type: Journal    
DOI: None     Document Type: Article

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