Ion beam milling of optically polished CaF2 surfaces

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 5180, Issue , 2003, Pages 81-88

  Flamm, D ^a   Schindler, A ^a   Berger, M ^b  

^a LEIBNIZ INSTITUTE OF SURFACE ENGINEERING IOM   (Germany)

^b Optikkomponenten und Kristalle   (Germany)

Author keywords

Calcium fluoride; DUV optics; Ion beam milling

Indexed keywords

CALCIUM COMPOUNDS; CRYSTAL ORIENTATION; DECOMPOSITION; ELECTRON IRRADIATION; ION BEAMS; ION BOMBARDMENT; LIGHT ABSORPTION; NANOSTRUCTURED MATERIALS; POLISHING; SINGLE CRYSTALS; SPUTTERING; SURFACE ROUGHNESS;

CALCIUM FLUORIDE; ION BEAM MILLING; ION SPUTTERING; LOW ENERGY ELECTRON IRRADIATION; SELF-ORGANIZED NANOSCALE STRUCTURE;

SURFACE TREATMENT;

EID: 1842504313     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

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14. We thanks J. Heber from the IOF Jena for the IR measurements and the helpful discussions.