Fabrication of microlens arrays in CaF2 by ion milling

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 4179, Issue 1, 2000, Pages 108-116

  Flamm, D ^a   Schindler, A ^a   Harzendorf, T ^b   Kley, E B ^b  

^a LEIBNIZ INSTITUTE OF SURFACE ENGINEERING IOM   (Germany)

^b FRIEDRICH SCHILLER UNIVERSITY JENA   (Germany)

Author keywords

Ion milling; Microlens arrays; Surface roughness

Indexed keywords

CALCIUM COMPOUNDS; DECOMPOSITION; PHOTORESISTS; SURFACE ROUGHNESS;

ION MILLING TRANSFERS; MICROLENS ARRAYS;

MICROOPTICS;

EID: 0034538805     PISSN: 0277786X     EISSN: None     Source Type: Journal    
DOI: 10.1117/12.395680     Document Type: Article

References (0)