Semiconductor fabrication drives deep-UV optics

Laser Focus World

Volumn 34, Issue 12, 1998, Pages

  Collier, David ^a   Pantley, Wayne ^a  

^a Alpine Research Optics   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

CALCIUM COMPOUNDS; COATINGS; COLOR CENTERS; DENSIFICATION; EXCIMER LASERS; FUSED SILICA; HYDROLYSIS; POLISHING; SEMICONDUCTOR DEVICE MANUFACTURE; THIN FILMS; ULTRAVIOLET RADIATION;

CALCIUM FLUORIDE; DEEP ULTRAVIOLET; FLAME HYDROLYSIS; OPTICAL POLISHING;

LASER OPTICS;

EID: 0032289566     PISSN: 07402511     EISSN: None     Source Type: Journal    
DOI: None     Document Type: Article

References (0)