SCOPUS 정보 검색 플랫폼 - 논문 보기

메뉴 건너뛰기

Volumn 43, Issue 8, 2004, Pages 1676-1682

Micro-optic fabrication with subdomain masking

(4) Pitchumani, Mahesh a Brown, Jeremiah a Mohammed, Waleed a Johnson, Eric G a

a UNIVERSITY OF CENTRAL FLORIDA (United States)

Author keywords

[No Author keywords available]

Indexed keywords

DIFFRACTIVE OPTICS; ETCHING; INTEGRATED CIRCUIT MANUFACTURE; MASKS; OPTICAL DEVICES; OPTICAL INSTRUMENT LENSES; PHOTORESISTS; THREE DIMENSIONAL;

MICRO-OPTICS FABRICATION; THREE-DIMENSIONAL MICRO-OPTIC ELEMENT;

MICROOPTICS;

EID: 1842429790 PISSN: 1559128X EISSN: 15394522 Source Type: Journal
DOI: 10.1364/AO.43.001676 Document Type: Article

Times cited : (3)

References (8)

1
- 0003547860
- (VUB, Brussels, Belgium)
- M. Kufner and S. Kufner, Micro-Optics and Lithography (VUB, Brussels, Belgium, 1997).
- (1997) Micro-Optics and Lithography
- Kufner, M.¹ Kufner, S.²

2
- 0011107277
- Micro-optical elements with arbitrary surfaces
- (Optical Society of America, Washington, D.C.)
- A. Schilling, Ph. Nussbaum, I. Philipoussis, H. P. Herzig, L. Stauffer, M. Rossi, and E. B. Kley, "Micro-optical elements with arbitrary surfaces," in Diffractive Optics and Micro-Optics, OSA Technical Digest (Optical Society of America, Washington, D.C., 2000), pp. 234-236.
- (2000) Diffractive Optics and Micro-Optics, OSA Technical Digest , pp. 234-236
- Schilling, A.¹ Nussbaum, Ph.² Philipoussis, I.³ Herzig, H.P.⁴ Stauffer, L.⁵ Rossi, M.⁶ Kley, E.B.⁷

3
- 0032043203
- Techniques for formation of the surface profile of diffractive optical elements
- (Elsevier Science, Amsterdam, The Netherlands)
- A. G. Poleshchuk, "Techniques for formation of the surface profile of diffractive optical elements," in Optics and Lasers in Engineering (Elsevier Science, Amsterdam, The Netherlands, 1998), Vol. 29, pp. 289-306.
- (1998) Optics and Lasers in Engineering , vol.29 , pp. 289-306
- Poleshchuk, A.G.¹

4
- 0011107016
- Wafer-scale replication of glass micrp-optics for optical communications
- (Optical Society of America, Washington, D.C.)
- T. J. Suleski, B. Baggett, H. Miller, B. Delaney, and J. Pagan, "Wafer-scale replication of glass micrp-optics for optical communications," in Diffractive Optics and Micro-Optics, OSA Technical Digest (Optical Society of America, Washington, D.C., 2000), pp. 231-233.
- (2000) Diffractive Optics and Micro-Optics, OSA Technical Digest , pp. 221-233
- Suleski, T.J.¹ Baggett, B.² Miller, H.³ Delaney, B.⁴ Pagan, J.⁵

5
- 0037057804
- Additive lithography for fabrication of diffractive optics
- M. Pitchumani, H. Hockel, W. Mohammed, and E. G. Johnson, "Additive lithography for fabrication of diffractive optics," Appl. Opt. 41, 6176-6181 (2002).
- (2002) Appl. Opt. , vol.41 , pp. 6176-6181
- Pitchumani, M.¹ Hockel, H.² Mohammed, W.³ Johnson, E.G.⁴

6
- 0038734202
- Additive lithography for refractive micro-optics
- in Micromachining Technology for Micro-Optics and Nano-Optics, E. G. Johnson, ed.
- M. Pitchumani, H. Hockel, J. Brown, W. Mohammed, and E. Johnson, "Additive lithography for refractive micro-optics," in Micromachining Technology for Micro-Optics and Nano-Optics, E. G. Johnson, ed., Proc. SPIE 4984, 1-9 (2003).
- (2003) Proc. SPIE , vol.4984 , pp. 1-9
- Pitchumani, M.¹ Hockel, H.² Brown, J.³ Mohammed, W.⁴ Johnson, E.⁵

7
- 0003973518
- A. K.-K. Wong, ed.; (SPIE, Bellingham)
- A. K.-K. Wong, ed., Resolution Enhancement Techniques in Optical Lithography, Vol. TT47 of the SPIE Tutorial Texts (SPIE, Bellingham, 2001).
- (2001) Resolution Enhancement Techniques in Optical Lithography, Vol. TT47 of the SPIE Tutorial Texts

8
- 0004255570
- (Marcel Dekker, New York)
- J. R. Shents and B. W. Smith, Microlithography, Science and Technology (Marcel Dekker, New York, 1998), pp. 109-152.
- (1998) Microlithography, Science and Technology , pp. 109-152
- Shents, J.R.¹ Smith, B.W.²

* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.