Additive lithography for refractive micro-optics

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 4984, Issue , 2003, Pages 1-9

  Pitchumani, Mahesh ^a   Hockel, Heidi ^a   Brown, Jeremiah ^a   Mohammed, Waleed ^a   Johnson, Eric G ^a  

^a UNIVERSITY OF CENTRAL FLORIDA   (United States)

Author keywords

Beam shaping; Diffractive Optical Element (DOE); Lithography; Photoresist; Refractive optics

Indexed keywords

DIFFRACTIVE OPTICS; FABRICATION; INTEGRATED CIRCUIT MANUFACTURE; LIGHT REFRACTION; LITHOGRAPHY; OPTICAL BEAM SPLITTERS; PHOTORESISTORS; REACTIVE ION ETCHING;

DIFFRACTIVE OPTICAL ELEMENTS (DOE);

MICROOPTICS;

EID: 0038734202     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.477839     Document Type: Conference Paper

References (10)

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