Techniques for formation of the surface profile of diffractive optical elements

Optics and Lasers in Engineering

Volumn 29, Issue 4-5, 1998, Pages 289-306

  Poleshchuk, A G ^a  

^a INSTITUTE OF AUTOMATION AND ELECTROMETRY   (Russian Federation)

Author keywords

[No Author keywords available]

Indexed keywords

ELECTROMAGNETIC WAVE DIFFRACTION; IMAGE PROCESSING; LIGHT TRANSMISSION; MASKS; SIGNAL FILTERING AND PREDICTION; X RAY LITHOGRAPHY;

DIFFRACTIVE OPTICAL ELEMENTS (DOE); PHOTOMASKS;

OPTICAL DEVICES;

EID: 0032043203     PISSN: 01438166     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0143-8166(97)00117-6     Document Type: Article

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