Studies on the structure and bonding state of nitric amorphous carbon (a-CNx) films by reactive rf magnetron sputtering

Thin Solid Films

Volumn 377-378, Issue , 2000, Pages 320-325

  Jung, Hae Suk ^a   Park, Hyung Ho ^a  

^a Yonsei University   (South Korea)

Author keywords

[No Author keywords available]

Indexed keywords

ANNEALING; BINDING ENERGY; HEAT RESISTANCE; MAGNETRON SPUTTERING; OPTICAL CORRELATION; PROTECTIVE COATINGS; X RAY PHOTOELECTRON SPECTROSCOPY;

NITRIC AMORPHOUS CARBON FILMS; REACTIVE MAGNETRON SPUTTERING;

AMORPHOUS FILMS;

EID: 18344414596     PISSN: 00406090     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0040-6090(00)01363-8     Document Type: Article

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