Dielectric and Barrier Properties of Spin-On Organic Aromatic Low Dielectric Constant Polymers FLARE and SiLK

Journal of the Electrochemical Society

Volumn 148, Issue 6, 2001, Pages

  Wu, Zhen Cheng ^a   Shiung, Zhi Wen ^a   Wu, Ren Guay ^a   Liu, Yu Lin ^a   Wu, Wei Hao ^a   Tsui, Bing Yue ^a   Chen, Mao Chieh ^a   Chang, Weng ^b   Chou, Pei Fen ^b   Jang, Syun Ming ^b   Yu, Chen Hua ^b   Liang, Mong Song ^b  

^a NATIONAL CHIAO TUNG UNIVERSITY   (Taiwan)

^b TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY   (Taiwan)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 18044401648     PISSN: 00134651     EISSN: None     Source Type: Journal    
DOI: 10.1149/1.1368107     Document Type: Article

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