Effects of poly(ethylene glycol) on properties of nanoporous silica film

Wuji Cailiao Xuebao/Journal of Inorganic Materials

Volumn 20, Issue 2, 2005, Pages 435-441

  Wang, Juan ^a   Zhang, Chang Rui ^a   Feng, Jian ^a  

^a NATIONAL UNIVERSITY OF DEFENSE TECHNOLOGY   (China)

Author keywords

Low dielectric constant; Nanoporous silica film; Poly(ethylene glycol); Sol gel

Indexed keywords

ADDITIVES; FILM PREPARATION; HYDROPHILICITY; NANOSTRUCTURED MATERIALS; POLYETHYLENE GLYCOLS; POROSITY; SILICA; SOL-GELS; SPIN COATING;

DIELECTRIC CONSTANT; NANOPOROUS FILMS; SILICON HYDROXIDATION STRUCTURE; SUPERCRITICAL DRYING; TETRAETHOXYSILANE; TRIMETHYLCHLOROSILANE;

DIELECTRIC FILMS;

EID: 17944382096     PISSN: 1000324X     EISSN: None     Source Type: Journal    
DOI: None     Document Type: Article

References (13)

1. Lee W W, Ho P S. MRS Bulletin, 1997, 22(10): 19-23.
2. Hyun S H, Kim J J, Park H H. J. Am. Cera. Soc., 2000, 83(3): 533-540.
3. Jain A, Rogojevic S, Ponoth S, et al. Thin Solid Films, 2001, 398-399: 513-522.
4. Robert D M. Science, 1999, 286: 421-423.
5. Hasegawa S, Tsukaoka T, Inokuma T, et al. J. Non-Cryst. Solids, 1998, 240: 154-165.
6. Kim K, Kwon D, Lee G. S. Thin Solid Films, 1998, 332: 369-374.
7. Valentini L, Braca E M, Kenny J, et al. J. Non-Cryst. Solids, 2001, 291: 153-159.
8. Chang T C, Mor Y S, Liu P T, et al. Thin Solid Films, 2001, 398-399: 523-526.
9. Godbey D J, Buckley L J, Purdy A P, et al. Thin Solid Films, 1997, 308-309: 470-474.
10. Jo M H, Park H H, Kim D J, et al. J. Appl. Phys., 1997, 82(3): 1299-1304.