Characterisation of the interface region in stepwise bias-graded layers of DLC films by a high-resolution depth profiling method

Thin Solid Films

Volumn 482, Issue 1-2, 2005, Pages 63-68

  Ziebert, C ^a   Bauer, C ^a   Stuber M ^a   Ulrich, S ^a   Holleck, H ^a  

^a KARLSRUHE INSTITUTE OF TECHNOLOGY   (Germany)

Author keywords

Depth profiling; Diamond like carbon (DLC); Interface characterisation; Mechanical properties; Stepwise bias graded layer design

Indexed keywords

CHARACTERIZATION; COMPRESSIVE STRESS; ELECTRIC POTENTIAL; FILM GROWTH; IONS; MAGNETIC STORAGE; SPUTTER DEPOSITION; SURFACE CHEMISTRY;

DEPTH PROFILING; INTERFACE CHARACTERIZATION; PROCESS PARAMETERS; STEPWISE-BIAS GRADED LAYER DESIGN;

DIAMOND LIKE CARBON FILMS;

EID: 17744399344     PISSN: 00406090     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.tsf.2004.11.117     Document Type: Conference Paper

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