An Investigation on the 3D Micromachining Techniques based on a SPM

Key Engineering Materials

Volumn 257-258, Issue , 2004, Pages 465-470

  Yan, Y D ^a   Sun, T ^a   Dong, S ^a   Liang, Y C ^a   Cheng, K ^a  

^a HARBIN INSTITUTE OF TECHNOLOGY   (China)

Author keywords

3 D Micro Machining; Precision 3D Stages; Scanning Probe Microscope; SPM

Indexed keywords

COMPUTER CONTROL SYSTEMS; LASERS; MICROSCOPIC EXAMINATION; MICROSTRUCTURE; PRECISION ENGINEERING;

PRECISION THREE DIMENSIONAL STAGES; SCANNING PROBE MICROSCOPE; SPM; THREE DIMENSIONAL MICROMACHINING;

MICROMACHINING;

EID: 17644446214     PISSN: 10139826     EISSN: 16629795     Source Type: Book Series    
DOI: None     Document Type: Article

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