Ultraprecision 3D Micromachining of Glass

CIRP Annals - Manufacturing Technology

Volumn 45, Issue 1, 1996, Pages 401-404

  Takeuchi, Y ^a   Sawada, K ^b   Sata, T ^c  

^a UNIVERSITY OF ELECTRO COMMUNICATIONS   (Japan)

^b Tokyo Institute of Technology   (Japan)

^c TOYOTA TECHNOLOGICAL INSTITUTE   (Japan)

Author keywords

Brittle material; Micromachining; Ultraprecision

Indexed keywords

BRITTLENESS; GLASS; LATHES; MILLING MACHINES; SURFACE ROUGHNESS; THREE DIMENSIONAL;

ULTRAPRECISION THREE DIMENSIONAL MICROMACHINING;

MICROMACHINING;

EID: 0029695862     PISSN: 00078506     EISSN: 17260604     Source Type: Journal    
DOI: 10.1016/S0007-8506(07)63090-X     Document Type: Article

References (7)

1. Design and Performance of a Small Precision CNC Turning Machine
2. Development of Ultraprecision Machining Center with Closed-Loop Structure and Its Control
3. Brittle-Ductile Transition Phenomena in Microindentation and Micromachining
4. Generation of Sculptured Surfaces by Means of an Ultraprecision Milling Machine
5. Micromachining Using Excimer Lasers
6. Performance Assessment in Ultraprecision Micromachining