Atomic force microscope using a diamond tip: A tool for micro/nano-machining on single crystal silicon surface

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 4601, Issue , 2001, Pages 73-78

  Zhao, Qingliang ^a   Sun, Tao ^a   Liang, Yingchun ^a   Dong, Shen ^a   Chen, Mingjun ^a  

^a HARBIN INSTITUTE OF TECHNOLOGY   (China)

Author keywords

Atomic force microscope (AFM); Diamond tip; FEM; Micro nano machining; Single crystal silicon; Tip wear

Indexed keywords

ATOMIC FORCE MICROSCOPY; COMPUTER SIMULATION; DIAMONDS; FINITE ELEMENT METHOD; MICROMACHINING; NANOTECHNOLOGY; SINGLE CRYSTALS; WEAR OF MATERIALS;

SURFACE QUALITY;

SILICON;

EID: 0035769057     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.444691     Document Type: Conference Paper

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