SCOPUS 정보 검색 플랫폼

Materials Research Society Symposium - Proceedings

Volumn 613, Issue , 2000, Pages

Fundamental study of iodate and iodine based slurries for copper CMP

(4) Lee, S M a Mahajan, U a Chen, Z a Singh, R K a

a University of Florida (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ATOMIC SPECTROSCOPY; CHEMICAL MECHANICAL POLISHING; COMPOSITION; COPPER; ELECTROCHEMISTRY; EMISSION SPECTROSCOPY; ENERGY DISPERSIVE SPECTROSCOPY; IODINE COMPOUNDS; MORPHOLOGY; PASSIVATION; SCANNING ELECTRON MICROSCOPY; SURFACE PROPERTIES;

BENZOTRIAZOLE; IODATE; OXIDIZERS; POTASSIUM IODIDE; SURFACE ANALYSES;

SLURRIES;

EID: 0034433714 PISSN: 02729172 EISSN: None Source Type: Conference Proceeding
DOI: 10.1557/proc-613-e7.8.1 Document Type: Conference Paper

Times cited : (5)

References (15)

1
- 0026260129
- (1991) J. Electrochem. Soc. , vol.138 , pp. 3460
- Kaufman, F.B.¹ Thompson, D.B.² Broadie, R.E.³ Jaso, M.A.⁴ Guthrie, W.L.⁵ Pearson, D.J.⁶ Small, M.B.⁷

2
- 0003508875
- Chemical mechanical planarization of microelectronic materials
- John Wiley and Sons, New York
- (1997)
- Steigerwald, J.M.¹ Murarka, S.P.² Gutmann, R.J.³

3
- 0029389318
- (1995) Thin Solid Films , vol.266 , pp. 238
- Carpio, R.¹ Farkas, J.² Jairath, R.³

4
- 0032320325
- (1998) Thin Solid Films , vol.335 , pp. 160
- Luo, Q.¹ Ramarajan, S.² Babu, S.V.³

5
- 0003961880
- (Aug.)
- (1995) Semiconductor Int. , pp. 123
- Rutten, M.¹ Feeney, P.² Cheek, R.³ Landers, W.⁴

6
- 0001760413
- (1995) Appl. Surf. Sci. , vol.91 , pp. 192
- Stavreva, Z.¹ Zeidler, D.² Plotner, M.³ Drescher, K.⁴

7
- 0001258406
- (1995) J. Vac. Sci. Technol. , vol.13 B , pp. 2215
- Steigerwald, J.M.¹ Murerka, S.P.² Gutmann, R.J.³ Duquette, D.J.⁴

8
- 0001519648
- (1995) Mater. Chem. Phys. , vol.41 , pp. 217
- Steigerwald, J.M.¹ Murerka, S.P.² Gutmann, R.J.³ Duquette, D.J.⁴

9
- 0003745040
- NACE, Houston, TX
- (1974) Atlas of Electrochemical Equilibria in Aqueous Solution
- Pourbaix, M.¹

10
- 0032674817
- (1999) Electrochem. and Solid-State Lett. , vol.2 , pp. 401
- Bielmann, M.¹ Mahajan, U.² Singh, R.K.³

11
- 0033101910
- (1999) Electrochem. and Solid-State Lett. , vol.2 , pp. 148
- Bielmann, M.¹ Mahajan, U.² Singh, R.K.³ Shah, D.O.⁴ Palla, B.J.⁵

12
- 0027682058
- (1993) J. Electrochem. Soc. , vol.140 , pp. 2791
- Wu, Y.C.¹ Zhang, P.² Pickering, H.W.³ Allara, D.L.⁴

13
- 0031078076
- (1997) J. Appl. Electrochem. , vol.27 , pp. 161
- Schweinsberg, D.P.¹ Bottle, S.E.² Otieno-Alego, V.³

15
- 0030082179
- (1996) J. Electrochem. Soc. , vol.143 , pp. 458
- Tromans, D.¹ Silva, J.²

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