Effects of membrane thickness on the pyroelectric properties of LiTaO 3 thin film IR detectors

Japanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers

Volumn 44, Issue 2, 2005, Pages 951-955

  Chan, Chao Chin ^a   Kao, Ming Cheng ^b   Chen, Ying Chung ^b  

^a KAO YUAN INSTITUTE OF TECHNOLOGY   (Taiwan)

^b NATIONAL SUN YAT SEN UNIVERSITY   (Taiwan)

Author keywords

Back etching; LiTaO3 infrared detectors; Thin membrane; Voltage responsivity

Indexed keywords

ANISOTROPY; DEPOSITION; ELECTRIC POTENTIAL; ETCHING; INFRARED DETECTORS; LITHIUM COMPOUNDS; MEMBRANES; PYROELECTRICITY; SOL-GELS; SYNTHESIS (CHEMICAL);

BACK ETCHING; LITAO3 INFRARED DETECTORS; THIN MEMBRANES; VOLTAGE RESPONSIVITY;

THIN FILMS;

EID: 17444403237     PISSN: 00214922     EISSN: None     Source Type: Journal    
DOI: 10.1143/JJAP.44.951     Document Type: Article

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